发明申请
- 专利标题: VERTICAL MEMORY DEVICES
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申请号: US16010743申请日: 2018-06-18
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公开(公告)号: US20190035808A1公开(公告)日: 2019-01-31
- 发明人: Sung-Min HWANG , Dong-Sik LEE , Joon-Sung LIM
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2017-0096719 20170731
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11568 ; H01L27/11573 ; H01L23/528 ; H01L23/522
摘要:
A vertical memory device is provided. The vertical memory device includes a substrate, first gate electrodes, a channel, first wirings, and second wirings. The substrate includes a cell region and a peripheral circuit region. The first gate electrodes are spaced apart from each other in a first direction on the cell region of the substrate, the first direction being substantially perpendicular to the substrate. The channel extends through a portion of the first gate electrodes in the first direction on the cell region. The first wirings are formed on the cell region, and are disposed at first levels that are higher in the first direction than gate electrode levels on which the first gate electrodes are respectively formed. The second wirings are formed on the peripheral circuit region, and are disposed at the first levels and at a second level that is higher than the gate electrode levels.
公开/授权文献
- US10700085B2 Vertical memory devices 公开/授权日:2020-06-30
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