- 专利标题: PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
-
申请号: US16122589申请日: 2018-09-05
-
公开(公告)号: US20180371637A1公开(公告)日: 2018-12-27
- 发明人: Lee Peng Chua , Steven T. Mayer , David W. Porter , Thomas A. Ponnuswamy
- 申请人: Novellus Systems, Inc.
- 主分类号: C25D21/18
- IPC分类号: C25D21/18 ; C25D17/10 ; C25D17/00 ; C25D5/00 ; C25D3/60 ; C25D21/06
摘要:
An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials (e.g., for deposition of Sn—Ag alloys) comprises an anode chamber for containing an anolyte comprising ions of a first, less noble metal, (e.g., tin), but not of a second, more noble, metal (e.g., silver) and an active anode; a cathode chamber for containing catholyte including ions of a first metal (e.g., tin), ions of a second, more noble, metal (e.g., silver), and the substrate; a separation structure positioned between the anode chamber and the cathode chamber, where the separation structure substantially prevents transfer of more noble metal from catholyte to the anolyte; and fluidic features and an associated controller coupled to the apparatus and configured to perform continuous electroplating, while maintaining substantially constant concentrations of plating bath components for extended periods of use.
公开/授权文献
- US10954605B2 Protecting anodes from passivation in alloy plating systems 公开/授权日:2021-03-23
信息查询