- 专利标题: Semiconductor Constructions Comprising Dielectric Material, and Methods of Forming Dielectric Fill Within Openings Extending into Semiconductor Constructions
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申请号: US15598795申请日: 2017-05-18
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公开(公告)号: US20180337087A1公开(公告)日: 2018-11-22
- 发明人: Gurtej S. Sandhu , Scott L. Light , John A. Smythe , Sony Varghese
- 申请人: Micron Technology, Inc.
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; H01L21/02 ; H01L21/3105 ; H01L29/06 ; G03F7/075 ; G03F7/038 ; G03F7/039 ; G03F7/20 ; G03F7/30
摘要:
Some embodiments include a semiconductor construction which has one or more openings extending into a substrate. The openings are at least partially filled with dielectric material comprising silicon, oxygen and carbon. The carbon is present to a concentration within a range of from about 3 atomic percent to about 20 atomic percent. Some embodiments include a method of providing dielectric fill across a semiconductor construction having an opening extending therein. The semiconductor construction has an upper surface proximate the opening. The method includes forming photopatternable dielectric material within the opening and across the upper surface, and exposing the photopatternable dielectric material to patterned actinic radiation. Subsequently, the photopatternable dielectric material is developed to pattern the photopatternable dielectric material into a first dielectric structure which at least partially fills the opening, and to remove the photopatternable dielectric material from over the upper surface.
公开/授权文献
- US10153195B1 Semiconductor constructions comprising dielectric material 公开/授权日:2018-12-11
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