Invention Application
- Patent Title: ELECTROTHERMALLY ACTUATED MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE PROVIDING INCREASED EFFICIENCY
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Application No.: US15768870Application Date: 2016-10-20
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Publication No.: US20180327253A1Publication Date: 2018-11-15
- Inventor: Guillaume JOURDAN , Guillaume LEHEE
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , SAFRAN ELECTRONICS & DEFENSE
- Applicant Address: FR Paris FR Boulogne Billancourt
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee Address: FR Paris FR Boulogne Billancourt
- Priority: FR1560043 20151021
- International Application: PCT/EP2016/075188 WO 20161020
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; G02B26/08 ; G02B6/35
Abstract:
An electrothermally actuated microelectromechanical and/or nanoelectromechanical structure including a stationary portion, at least one portion which is movable relative to the stationary portion, at least one electrothermal actuation beam which makes it possible to cause an electric current to flow from the stationary portion to the movable portion, is mechanically connected to the movable portion and is intended to move the movable portion relative to the stationary portion by electrothermal actuation, and at least one electrically conductive connection element electrically connecting the movable portion to the stationary portion, the actuation beam having a thickness of no greater than half one thickness of the movable portion and no greater than half one thickness of the connection element.
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