- 专利标题: POLARIZATION PROPERTY IMAGE MEASUREMENT DEVICE, AND POLARIZATION PROPERTY IMAGE MEASUREMENT METHOD
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申请号: US16003882申请日: 2018-06-08
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公开(公告)号: US20180292310A1公开(公告)日: 2018-10-11
- 发明人: Takanori KOJIMA , Satoru Odate , Toru Takagi
- 申请人: NIKON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NIKON CORPORATION
- 当前专利权人: NIKON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2015-242559 20151211
- 主分类号: G01N21/21
- IPC分类号: G01N21/21 ; H01L27/146 ; G01N21/31 ; G06T7/521 ; G06T15/00 ; A61B1/00 ; A61B1/04 ; A61B1/06
摘要:
A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
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