- 专利标题: RESIST UNDERLAYER FILM COMPOSITION, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM
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申请号: US15915737申请日: 2018-03-08
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公开(公告)号: US20180284614A1公开(公告)日: 2018-10-04
- 发明人: Hironori SATOH , Hiroko NAGAI , Takeru WATANABE , Daisuke KORI , Tsutomu OGIHARA
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2017-71098 20170331
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; G03F7/09 ; H01L21/311 ; H01L21/308 ; H01L21/266 ; G03F7/16 ; G03F7/20 ; G03F7/38 ; G03F7/32 ; C07C69/94 ; C07D251/32 ; C07D487/04 ; C07C39/14 ; C07C39/17 ; C08F220/32 ; C08F220/28
摘要:
A resist underlayer film composition is excellent in resistance to a basic hydrogen peroxide aqueous solution in gap-filling and planarization characteristics having a dry etching characteristic; a patterning process and method for forming a resist underlayer film, wherein the resist underlayer film composition is used for a multilayer resist method, the composition comprising: (a1) one, or two or more, of a compound represented by following general formula (x); and (b) an organic solvent, wherein n01 represents an integer of 1 to 10; when n01 is 2, w represents a sulfinyl group, a sulfonyl group, an ether group, or a divalent organic group having 2 to 50 carbon atoms; when n01 is an integer other than 2, w represents an n01-valent organic group having 2 to 50 carbon atoms; and y represents a single bond or divalent connecting group having 1 to 10 carbon atoms and optionally having an oxygen atom.
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