Invention Application
- Patent Title: COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STORAGE MEDIUM
-
Application No.: US15876283Application Date: 2018-01-22
-
Publication No.: US20180211832A1Publication Date: 2018-07-26
- Inventor: Takafumi HASIMOTO , Masahide TADOKORO , Taku NAGAKANE , Koji TAKAYANAGI
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2017-012315 20170126; JP2017-199613 20171013
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; H01L21/687 ; B08B3/08 ; B08B3/04 ; G03F7/40

Abstract:
There is provided a coated film removing apparatus for removing, with a removal liquid, a peripheral portion of a coated film formed by supplying a coating liquid to a surface of a circular substrate, including: a rotary holding part configured to hold the substrate and rotate together with the substrate; a removal liquid nozzle configured to discharge the removal liquid on a peripheral portion of the surface of the substrate held by the rotary holding part so that the removal liquid is oriented toward a downstream side in a rotational direction of the substrate; and a control part configured to output a control signal so as to rotate the substrate at a rotation speed of 2,300 rpm or more when discharging the removal liquid.
Public/Granted literature
- US11062899B2 Coated film removing apparatus Public/Granted day:2021-07-13
Information query
IPC分类: