Invention Application
- Patent Title: MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCTURES
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Application No.: US15916962Application Date: 2018-03-09
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Publication No.: US20180201502A1Publication Date: 2018-07-19
- Inventor: Michael T. Brigham , Christopher V. Jahnes , Cameron E. Luce , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , Eric J. White
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G06F17/50 ; B81B3/00
Abstract:
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both metal material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.
Public/Granted literature
- US10549987B2 Micro-electro-mechanical system (MEMS) structures and design structures Public/Granted day:2020-02-04
Information query
