Invention Application
- Patent Title: SUBSTRATE TRANSFER MECHANISMS
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Application No.: US15905400Application Date: 2018-02-26
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Publication No.: US20180182660A1Publication Date: 2018-06-28
- Inventor: Masato ISHII , Mehmet Tugrul SAMIR , Shu-Kwan LAU , Jeffrey TOBIN
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677 ; C23C16/458 ; C30B35/00 ; C30B25/12 ; H01L21/67
Abstract:
In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.
Public/Granted literature
- US10453733B2 Substrate transfer mechanisms Public/Granted day:2019-10-22
Information query
IPC分类:
