- 专利标题： MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCTURES
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申请号： US15894119申请日： 2018-02-12
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公开(公告)号： US20180179052A1公开(公告)日： 2018-06-28
- 发明人: Michael T. Brigham , Christopher V. Jahnes , Cameron E. Luce , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , Eric J. White
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; G06F17/50 ; B81B3/00
摘要：
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.
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