- 专利标题: MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
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申请号: US15904631申请日: 2018-02-26
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公开(公告)号: US20180179050A1公开(公告)日: 2018-06-28
- 发明人: Amnon Brosh , Ryan Diestelhorst , Steven Nasiri
- 申请人: NextInput, Inc.
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01L1/18 ; G01L1/20 ; B81C1/00
摘要:
Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.
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