- 专利标题: AIR CAVITY PACKAGES AND METHODS FOR THE PRODUCTION THEREOF
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申请号: US15269629申请日: 2016-09-19
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公开(公告)号: US20180082915A1公开(公告)日: 2018-03-22
- 发明人: LAKSHMINARAYAN VISWANATHAN , JAYNAL A. MOLLA , DAVID ABDO , MALI MAHALINGAM , CARL D'ACOSTA
- 申请人: FREESCALE SEMICONDUCTOR INC.
- 申请人地址: US TX AUSTIN
- 专利权人: FREESCALE SEMICONDUCTOR INC.
- 当前专利权人: FREESCALE SEMICONDUCTOR INC.
- 当前专利权人地址: US TX AUSTIN
- 主分类号: H01L23/20
- IPC分类号: H01L23/20 ; H01L23/047 ; H01L21/48 ; H01L23/057 ; H01L23/367 ; B22F3/10 ; B22F1/00 ; B23K35/02 ; B23K35/30
摘要:
Air cavity packages and methods for producing air cavity packages containing sintered bonded components, multipart window frames, and/or other unique structural features are disclosed. In one embodiment, a method for fabricating an air cavity package includes the step or process of forming a first metal particle-containing precursor layer between a base flange and a window frame positioned over the base flange. A second metal particle-containing precursor layer is further formed between the base flange and a microelectronic device positioned over the base flange. The metal particle-containing precursor layers are sintered substantially concurrently at a maximum processing temperature less than melt point(s) of metal particles within the layers to produce a first sintered bond layer from the first precursor layer joining the window frame to the base flange and to produce a second sintered bond layer from the second precursor layer joining the microelectronic device to the base flange.
公开/授权文献
- US09922894B1 Air cavity packages and methods for the production thereof 公开/授权日:2018-03-20
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