Invention Application
- Patent Title: INERTIAL SENSOR
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Application No.: US15724385Application Date: 2017-10-04
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Publication No.: US20180045752A1Publication Date: 2018-02-15
- Inventor: Hideaki Fukuzawa , Michiko Hara , Yoshihiko Fuji , Yoshihiro Higashi , Shiori Kaji , Akio Hori , Tomohiko Nagata , Akiko Yuzawa , Akira Kikitsu
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Priority: JP2013-196056 20130920
- Main IPC: G01P15/105
- IPC: G01P15/105 ; G01P15/08

Abstract:
According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
Public/Granted literature
- US10254305B2 Inertial sensor Public/Granted day:2019-04-09
Information query
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