Invention Application
- Patent Title: METHOD OF MANUFACTURING PERPENDICULAR MAGNETIC RECORDING HEAD
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Application No.: US15197342Application Date: 2016-06-29
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Publication No.: US20180005648A1Publication Date: 2018-01-04
- Inventor: Ken FUJII , Hisayoshi WATANABE , Masachika HASHINO , Takamitsu SAKAMOTO , Tetsuya HIRAKI
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Main IPC: G11B5/127
- IPC: G11B5/127 ; C23C16/455 ; C23C16/04 ; C23C16/40 ; G11B5/39 ; G11B5/11

Abstract:
This method of manufacturing a perpendicular magnetic recording head includes: forming a water-soluble resin film on a base; forming a first resist pattern having an opening on the water-soluble resin film; selectively dissolving the water-soluble resin film exposed at a bottom of the opening with a developer to expose a part of a surface of the base; forming a non-magnetic oxide film to cover the opening and the exposed part of the surface of the base; forming a second resist pattern to fill the opening covered with the non-magnetic oxide film and then removing the first resist pattern and the non-magnetic oxide film; forming a first side shield and a second side shield on the base to allow them to face each other with the second resist pattern therebetween; and forming a magnetic pole between the first and the second side shields after removal of the second resist pattern.
Information query
IPC分类: