Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Application No.: US15258275Application Date: 2016-09-07
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Publication No.: US20170263621A1Publication Date: 2017-09-14
- Inventor: Satoshi WAKATSUKI , Atsuko SAKATA , Daisuke IKENO
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
According to one embodiment, a stacked body includes a plurality of metal layers stacked with an insulator interposed. A semiconductor body extends in a stacking direction through the stacked body. A charge storage portion is provided between the semiconductor body and one of the metal layers. A metal nitride film has a first portion and a second portion. The first portion is provided between the charge storage portion and one of the metal layers. The second portion is thicker than the first portion and is provided between one of the metal layers and the insulator.
Public/Granted literature
- US10269825B2 Semiconductor device and method for manufacturing same Public/Granted day:2019-04-23
Information query
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