- 专利标题: POROUS SILICON RELAXATION MEDIUM FOR DISLOCATION FREE CMOS DEVICES
-
申请号: US15363365申请日: 2016-11-29
-
公开(公告)号: US20170076998A1公开(公告)日: 2017-03-16
- 发明人: Kangguo Cheng , Ramachandra Divakaruni , Jeehwan Kim , Juntao Li , Devendra K. Sadana
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: H01L21/84
- IPC分类号: H01L21/84 ; H01L21/8238
摘要:
A method for forming CMOS devices includes masking a first portion of a tensile-strained silicon layer of a SOI substrate, doping a second portion of the layer outside the first portion and growing an undoped silicon layer on the doped portion and the first portion. The undoped silicon layer becomes tensile-strained. Strain in the undoped silicon layer over the doped portion is relaxed by converting the doped portion to a porous silicon to form a relaxed silicon layer. The porous silicon is converted to an oxide. A SiGe layer is grown and oxidized to convert the relaxed silicon layer to a compressed SiGe layer. Fins are etched in the first portion from the tensile-strained silicon layer and the undoped silicon layer and in the second portion from the compressed SiGe layer.
公开/授权文献
信息查询
IPC分类: