Invention Application
- Patent Title: SEMICONDUCTOR DEVICE INCLUDING EPITAXIALLY FORMED BURIED CHANNEL REGION
- Patent Title (中): 包含外延形成的通道区域的半导体器件
-
Application No.: US14953481Application Date: 2015-11-30
-
Publication No.: US20170062589A1Publication Date: 2017-03-02
- Inventor: Jie Deng , Pranita Kerber , Qiqing C. Ouyang , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10 ; H01L29/167 ; H01L29/165

Abstract:
A semiconductor device includes at least one semiconductor fin on an upper surface of a substrate. The at least one semiconductor fin includes a channel region interposed between opposing source/drain regions. A gate stack is on the upper surface of the substrate and wraps around sidewalls and an upper surface of only the channel region. The channel region is a dual channel region including a buried channel portion and a surface channel portion that completely surrounds the buried channel.
Public/Granted literature
- US09595598B1 Semiconductor device including epitaxially formed buried channel region Public/Granted day:2017-03-14
Information query
IPC分类: