发明申请
US20170015589A1 OXIDE SINTERED BODY, PROCESS FOR MANUFACTURING SAME, AND OXIDE FILM
有权
氧化物烧结体,其制造方法和氧化物膜
- 专利标题: OXIDE SINTERED BODY, PROCESS FOR MANUFACTURING SAME, AND OXIDE FILM
- 专利标题(中): 氧化物烧结体,其制造方法和氧化物膜
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申请号: US15125044申请日: 2015-01-30
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公开(公告)号: US20170015589A1公开(公告)日: 2017-01-19
- 发明人: Kentaro SOGABE , Isao ANDO , Makoto OZAWA
- 申请人: SUMITOMO METAL MINING CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO METAL MINING CO., LTD.
- 当前专利权人: SUMITOMO METAL MINING CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-113139 20140530
- 国际申请: PCT/JP2015/052631 WO 20150130
- 主分类号: C04B35/16
- IPC分类号: C04B35/16 ; C23C14/34 ; C23C14/08
摘要:
The present invention provides: an oxide sintered body having superior manufacturing stability, film stability, discharge stability, and mechanical strength; a process for manufacturing the same; and an oxide film obtained by using the oxide sintered body and having an intermediate refractive index. The oxide sintered body comprising In and Si, wherein a Si content is 0.65 to 1.75 in Si/In atomic ratio, a relative density is 90% or more, and a bending strength is 90 N/mm2 or more, is manufactured, and the oxide film with refractive index of 1.70 to 1.90 by a sputtering process using the oxide sintered body is manufactured.
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