Invention Application
US20160327866A1 PATTERN FORMING METHOD, TREATING AGENT, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING THE SAME
审中-公开
图案形成方法,处理剂,电子装置及其制造方法
- Patent Title: PATTERN FORMING METHOD, TREATING AGENT, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 图案形成方法,处理剂,电子装置及其制造方法
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Application No.: US15216777Application Date: 2016-07-22
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Publication No.: US20160327866A1Publication Date: 2016-11-10
- Inventor: Hajime FURUTANI , Michihiro SHIRAKAWA , Akiyoshi GOTO , Masafumi KOJIMA
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2014-038764 20140228; JP2015-023657 20150209
- Main IPC: G03F7/16
- IPC: G03F7/16

Abstract:
A pattern forming method includes, in this order: a step (1) of forming a film on a substrate by using an actinic ray-sensitive or radiation-sensitive resin composition containing at least a resin having a group that is decomposed due to an action of an acid so as to generate a polar group; a step (2) of exposing the film; a step (3) of causing the exposed film to come into contact with a component that performs any one interaction of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction with a polar group generated in the exposed film without substantially dissolving the exposed film; and a step (4) of forming a pattern by developing the exposed film by using a developer including an organic solvent and removing an area of the film having a small exposure amount.
Public/Granted literature
- US10303058B2 Pattern forming method, treating agent, electronic device, and method for manufacturing the same Public/Granted day:2019-05-28
Information query
IPC分类: