- 专利标题: Control of Impedance of RF Return Path
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申请号: US15133049申请日: 2016-04-19
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公开(公告)号: US20160233058A1公开(公告)日: 2016-08-11
- 发明人: Alexei Marakhtanov , Rajinder Dhindsa , Ken Lucchesi , Luc Albarede
- 申请人: Lam Research Corporation
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A system for controlling an impedance of a radio frequency (RF) return path includes a matchbox further including a match circuitry. The system further includes an RF generator coupled to the matchbox to supply an RF supply signal to the matchbox via a first portion of an RF supply path. The RF generator is coupled to the matchbox to receive an RF return signal via a first portion of an RF return path. The system also includes a switch circuit and a plasma reactor coupled to the switch circuit via a second portion of the RF return path. The plasma reactor is coupled to the match circuitry via a second portion of the RF supply path. The system includes a controller coupled to the switch circuit, the controller configured to control the switch circuit based on a tune recipe to change an impedance of the RF return path.
公开/授权文献
- US10249476B2 Control of impedance of RF return path 公开/授权日:2019-04-02
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