发明申请
US20160172297A1 DESIGNED-BASED INTERCONNECT STRUCTURE IN SEMICONDUCTOR STRUCTURE 审中-公开
半导体结构中基于设计的互连结构

DESIGNED-BASED INTERCONNECT STRUCTURE IN SEMICONDUCTOR STRUCTURE
摘要:
Semiconductor structures are provided. The semiconductor structure includes a plurality of gate structures extending in a first direction formed over a substrate. The gate structures follow the following equation: 0.2   P gate   min + 0.35   L gate   min + 0.3   H gate   min - 20 0.2   L gate   min + 0.8   H gate   min - 5 × 0.3   L gate   min + 0.3   H gate   min + 5 38 ≤ 0.32 Pgate min is the minimum value among gate pitches of the gate structures, and Lgate min is the minimum value among gate lengths of the gate structures. Hgate min is the minimum value among gate heights of the gate structures.
信息查询
0/0