发明申请
- 专利标题: GAS INJECTORS
- 专利标题(中): 燃气喷射器
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申请号: US14963744申请日: 2015-12-09
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公开(公告)号: US20160168704A1公开(公告)日: 2016-06-16
- 发明人: Ji-Hoon CHOI , Young-Jin NOH , Joong-Yun RA , Jae-Young AHN , Hun-hyeong LIM
- 申请人: Ji-Hoon CHOI , Young-Jin NOH , Joong-Yun RA , Jae-Young AHN , Hun-hyeong LIM
- 优先权: KR10-2014-0177175 20141210
- 主分类号: C23C16/455
- IPC分类号: C23C16/455
摘要:
A gas injector may comprise: a gas introduction tube configured to introduce reaction gas into a reaction tube from a gas supply source; and/or a gas distributor connected to the gas introduction tube, extending from the gas introduction tube in a direction within the reaction tube, including a plurality of ejection holes in an inner surface of the gas distributor, and having an arc shape extending in a circumferential direction of the reaction tube. The ejection holes may be spaced apart from each other in the extending direction of the gas distributor, and are configured to spray the reaction gas.
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