发明申请
US20160157978A1 MATERIAL DEPOSITION DEVICE AND METHOD OF USE 有权
材料沉积装置及其使用方法

  • 专利标题: MATERIAL DEPOSITION DEVICE AND METHOD OF USE
  • 专利标题(中): 材料沉积装置及其使用方法
  • 申请号: US14561978
    申请日: 2014-12-05
  • 公开(公告)号: US20160157978A1
    公开(公告)日: 2016-06-09
  • 发明人: Wojtek Tutak
  • 申请人: ADA FOUNDATION
  • 主分类号: A61C19/06
  • IPC分类号: A61C19/06 B05D1/02 B05B7/00
MATERIAL DEPOSITION DEVICE AND METHOD OF USE
摘要:
A material deposition device includes a solution supply component, a gas supply component, and a co-axial discharge mechanism. The co-axial discharge mechanism includes a solution discharge mechanism, and a gas discharge mechanism co-axial with the solution discharge mechanism. The material deposition device further includes an alignment component that aligns the solution discharge mechanism in a center of the gas discharge mechanism; and an orifice plate with a number of turbulence inducing structures that induce turbulence in gas exiting the gas discharge mechanism.
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