Invention Application
US20160111635A1 DURABLE MINIATURE GAS COMPOSITION DETECTOR HAVING FAST RESPONSE TIME
审中-公开
具有快速反应时间的耐用微型气体组合物检测器
- Patent Title: DURABLE MINIATURE GAS COMPOSITION DETECTOR HAVING FAST RESPONSE TIME
- Patent Title (中): 具有快速反应时间的耐用微型气体组合物检测器
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Application No.: US14982600Application Date: 2015-12-29
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Publication No.: US20160111635A1Publication Date: 2016-04-21
- Inventor: Olivier Le Neel , Ravi Shankar
- Applicant: STMicroelectronics Pte Ltd
- Main IPC: H01L43/14
- IPC: H01L43/14 ; H01L21/8234 ; H01L43/04 ; H01L43/10 ; H01L43/06

Abstract:
A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measurable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.
Public/Granted literature
- US09818937B2 Durable miniature gas composition detector having fast response time Public/Granted day:2017-11-14
Information query
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