Invention Application
US20150371831A1 MULTI-ZONE GAS INJECTION ASSEMBLY WITH AZIMUTHAL AND RADIAL DISTRIBUTION CONTROL
有权
多区域气体注入装置与三角形和径向分布控制
- Patent Title: MULTI-ZONE GAS INJECTION ASSEMBLY WITH AZIMUTHAL AND RADIAL DISTRIBUTION CONTROL
- Patent Title (中): 多区域气体注入装置与三角形和径向分布控制
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Application No.: US14762219Application Date: 2014-02-03
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Publication No.: US20150371831A1Publication Date: 2015-12-24
- Inventor: Yan Rozenzon , Kyle Tantiwong , Imad Yousif , Vladimir Knyazik , Bojenna Keating , Samer Banna
- Applicant: APPLIED MATERIALS, INC.
- International Application: PCT/US14/14389 WO 20140203
- Main IPC: H01J37/32
- IPC: H01J37/32
Abstract:
A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.
Public/Granted literature
- US10008368B2 Multi-zone gas injection assembly with azimuthal and radial distribution control Public/Granted day:2018-06-26
Information query
