Invention Application
- Patent Title: IMPRINT TEMPLATE AND METHODS THEREOF
- Patent Title (中): 印刷模板及其方法
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Application No.: US14699412Application Date: 2015-04-29
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Publication No.: US20150302881A1Publication Date: 2015-10-22
- Inventor: Sundeep Chauhan , Alexander Kantorov , Kim Yang Lee , David Kuo , Rene Johannes Marinus Van de Veerdonk , Barmeshwar Vikaramaditya
- Applicant: Seagate Technology LLC
- Main IPC: G11B5/86
- IPC: G11B5/86 ; G11B5/855 ; G11B5/596 ; G03F7/004 ; G11B11/03
Abstract:
Provided herein is a method, including forming a first template including a first pattern, wherein forming the first template includes self-assembly of diblock copolymers guided by an initial pattern; forming a second template including a second pattern, wherein the second pattern corresponds to a servo pattern; and forming a master template from the first template, wherein the master template includes one or more portions of the first pattern combined with the second pattern.
Public/Granted literature
- US09905259B2 Imprint template and methods thereof Public/Granted day:2018-02-27
Information query
IPC分类:
