发明申请
- 专利标题: PURIFICATION SYSTEM
- 专利标题(中): 净化系统
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申请号: US14432741申请日: 2013-09-30
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公开(公告)号: US20150273365A1公开(公告)日: 2015-10-01
- 发明人: Marc Laverdiere , Hirokazu Kuwabara , Koichi Kurata , John P. Puglia , Ben Mai Pak Lee , Louis Barrows, JR. , Kalyan Madhavaram , Dmitri Menn , J. Karl Niermeyer , Craig Wallace Martland
- 申请人: ENTEGRIS, INC.
- 国际申请: PCT/US2013/062745 WO 20130930
- 主分类号: B01D29/52
- IPC分类号: B01D29/52 ; F16L19/025 ; B01D63/14
摘要:
The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.
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