发明申请
- 专利标题: SEMICONDUCTOR-ON-INSULATOR WITH BACK SIDE SUPPORT LAYER
- 专利标题(中): 具有背面支撑层的半导体绝缘体
-
申请号: US14707998申请日: 2015-05-08
-
公开(公告)号: US20150249056A1公开(公告)日: 2015-09-03
- 发明人: Stuart B. Molin , Paul A. Nygaard , Michael A. Stuber
- 申请人: Silanna Semiconductor U.S.A., Inc.
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/762 ; H01L21/78 ; H01L27/12
摘要:
In one embodiment, an integrated circuit with a signal-processing region is disclosed. The integrated circuit comprises a silicon-on-insulator die singulated from a silicon-on-insulator wafer. The silicon on insulator die comprises an active layer, an insulator layer, a substrate, and a strengthening layer. The substrate consists of an excavated substrate region, and a support region, the support region is in contact with the insulator layer. The excavated region covers a majority of the signal-processing region of the integrated circuit.
公开/授权文献
- US09496227B2 Semiconductor-on-insulator with back side support layer 公开/授权日:2016-11-15
信息查询
IPC分类: