Invention Application
- Patent Title: SINKER WITH A REDUCED WIDTH
- Patent Title (中): SINKER与减少的宽度
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Application No.: US14682823Application Date: 2015-04-09
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Publication No.: US20150214096A1Publication Date: 2015-07-30
- Inventor: Binghua HU , Sameer PENDHARKAR , Guru MATHUR , Takehito TAMURA
- Applicant: Texas Instruments Incorporated
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/3205 ; H01L21/02 ; H01L21/265 ; H01L21/283
Abstract:
The width of a heavily-doped sinker is substantially reduced by forming the heavily-doped sinker to lie in between a number of closely-spaced trench isolation structures, which have been formed in a semiconductor material. During drive-in, the closely-spaced trench isolation structures significantly limit the lateral diffusion.
Public/Granted literature
- US10163678B2 Sinker with a reduced width Public/Granted day:2018-12-25
Information query
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