发明申请
- 专利标题: ADAPTER FOR REPLACEABLE LAMP
- 专利标题(中): 适配器可更换灯
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申请号: US14546103申请日: 2014-11-18
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公开(公告)号: US20150179425A1公开(公告)日: 2015-06-25
- 发明人: Joseph M. RANISH , Oleg V. SEREBRYANOV
- 申请人: Applied Materials, Inc.
- 主分类号: H01K1/46
- IPC分类号: H01K1/46 ; H01K1/66 ; H05B3/00 ; H01K1/36
摘要:
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
公开/授权文献
- US09922815B2 Adapter for replaceable lamp 公开/授权日:2018-03-20
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