发明申请
US20150179425A1 ADAPTER FOR REPLACEABLE LAMP 有权
适配器可更换灯

ADAPTER FOR REPLACEABLE LAMP
摘要:
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
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