发明申请
- 专利标题: WAVELENGTH-SELECTABLE COATING THICKNESS MEASUREMENT APPARATUS
- 专利标题(中): 波长选择涂层厚度测量仪
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申请号: US14505747申请日: 2014-10-03
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公开(公告)号: US20150159997A1公开(公告)日: 2015-06-11
- 发明人: Jeong Eun KIM , Hyun Seo KANG , Hyoung Jun PARK , Young Soon HEO , Keo Sik KIM , Eun Kyoung JEON , Kwon Seob LIM , Young Sun KIM
- 申请人: Electronics and Telecommunications Research Institute
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2013-0152913 20131210
- 主分类号: G01B11/06
- IPC分类号: G01B11/06
摘要:
Provided is an apparatus that measures a thickness of a coating by selecting a wavelength of a laser based on a color of the coating using a contactless method using a photoacoustic effect and an interferometer, the apparatus including a pulsed laser source to irradiate a pulsed laser beam toward the coating, a continuous wave (CW) laser source to irradiate a CW laser beam toward the coating, a detector to detect an optical interference signal corresponding to the CW laser beam, and a signal processor to process the optical interference signal to calculate a thickness of the coating.
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