发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND DIE BONDING STRUCTURE THEREOF
- 专利标题(中): 半导体器件和DIE结合结构
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申请号: US14515700申请日: 2014-10-16
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公开(公告)号: US20150123253A1公开(公告)日: 2015-05-07
- 发明人: Kyu Hyo Hwang , Jong Hong Lee , Gab Soo Choi , Cha Soo Jeon , Jin Sang Park , Sang Bo Bae , Yong Min Park , Sung Jin An
- 申请人: KEC Corporation
- 优先权: KR10-2013-0133760 20131105
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/495
摘要:
Provided are a semiconductor device and a bonding structure thereof, in which an inter-metal compound is not formed with a semiconductor die or a lead frame, thereby improving electrical and mechanical properties and wettability and suppressing conglomeration of a die bonding material. The semiconductor device includes a semiconductor die, a barrier layer formed on a surface of the semiconductor die, a first metal layer formed on the barrier layer, a central metal layer formed on the first metal layer, and a second metal layer formed on the central metal layer. Here, the first and second metal layers have a first melting temperature, and the central metal layer has a second melting temperature lower than the first melting temperature.
公开/授权文献
- US09070561B2 Semiconductor device and die bonding structure thereof 公开/授权日:2015-06-30
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