Invention Application
- Patent Title: MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
- Patent Title (中): 微机械传感器装置及相关制造方法
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Application No.: US14534903Application Date: 2014-11-06
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Publication No.: US20150123221A1Publication Date: 2015-05-07
- Inventor: Jochen REINMUTH , Julian GONSKA
- Applicant: Robert Bosch GmbH
- Priority: DE102013222583.0 20131107
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A micromechanical sensor device and a corresponding manufacturing method are described. The micromechanical sensor device includes a CMOS wafer having a front side and a rear side, a rewiring device formed on the front side of the CMOS wafer including a plurality of stacked printed conductor levels and insulation layers, an MEMS wafer having a front side and a rear side, a micromechanical sensor device formed across the front side of the MEMS wafer, a bond connection between the MEMS wafer and the CMOS wafer, a cavern between the MEMS wafer and the CMOS wafer, in which the sensor device is hermetically enclosed, and an exposed getter layer area applied to at least one of the plurality of stacked printed conductor levels and insulation layers.
Public/Granted literature
- US09567205B2 Micromechanical sensor device with a getter in an enclosed cavity Public/Granted day:2017-02-14
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