Invention Application
US20150123221A1 MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD 有权
微机械传感器装置及相关制造方法

  • Patent Title: MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
  • Patent Title (中): 微机械传感器装置及相关制造方法
  • Application No.: US14534903
    Application Date: 2014-11-06
  • Publication No.: US20150123221A1
    Publication Date: 2015-05-07
  • Inventor: Jochen REINMUTHJulian GONSKA
  • Applicant: Robert Bosch GmbH
  • Priority: DE102013222583.0 20131107
  • Main IPC: B81B7/00
  • IPC: B81B7/00 B81C1/00
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
Abstract:
A micromechanical sensor device and a corresponding manufacturing method are described. The micromechanical sensor device includes a CMOS wafer having a front side and a rear side, a rewiring device formed on the front side of the CMOS wafer including a plurality of stacked printed conductor levels and insulation layers, an MEMS wafer having a front side and a rear side, a micromechanical sensor device formed across the front side of the MEMS wafer, a bond connection between the MEMS wafer and the CMOS wafer, a cavern between the MEMS wafer and the CMOS wafer, in which the sensor device is hermetically enclosed, and an exposed getter layer area applied to at least one of the plurality of stacked printed conductor levels and insulation layers.
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