Invention Application
- Patent Title: Coating of Graphite Tooling for Manufacture of Semiconductors
- Patent Title (中): 石墨模具制造半导体涂层
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Application No.: US14482575Application Date: 2014-09-10
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Publication No.: US20150069213A1Publication Date: 2015-03-12
- Inventor: John Carberry
- Applicant: Mossey Creek Solar, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L31/18
Abstract:
A tool useful in the manufacture of a semiconductor is disclosed. A mold is providing having an interior defining a planar capillary space. A coating substantially covers at least the planar capillary space of the graphite member. The coating is substantially non-reactive to silicon at temperatures greater than approximately 1420 degrees Centigrade.
Public/Granted literature
- US09620664B2 Coating of graphite tooling for manufacture of semiconductors Public/Granted day:2017-04-11
Information query
IPC分类:
