发明申请
- 专利标题: NON-VOLATILE MEMORY STRUCTURE
- 专利标题(中): 非易失性存储器结构
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申请号: US14459050申请日: 2014-08-13
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公开(公告)号: US20140346586A1公开(公告)日: 2014-11-27
- 发明人: Chih-Chieh Cheng , Shih-Guei Yan , Wen-Jer Tsai
- 申请人: MACRONIX International Co., Ltd.
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L29/423
摘要:
A non-volatile memory structure, including a substrate, a plurality of stacked structures, a plurality of first conductive type doped regions, at least one second conductive type doped region, a conductive layer, and a first dielectric layer, is provided. The stacked structures are disposed on the substrate, and each of the stacked structures includes a charge storage structure. The first conductive type doped regions are disposed in the substrate under the corresponding charge storage structures respectively. The second conductive type doped region is disposed in the substrate between the adjacent charge storage structures and has an overlap region with each of the charge storage structures. The conductive layer covers the second conductive type doped region. The first dielectric layer is disposed between the conductive layer and the second conductive type doped region.
公开/授权文献
- US09070588B2 Non-volatile memory structure 公开/授权日:2015-06-30
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