Invention Application
- Patent Title: MEMS Device and Method of Manufacturing a MEMS Device
- Patent Title (中): MEMS器件和制造MEMS器件的方法
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Application No.: US13750941Application Date: 2013-01-25
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Publication No.: US20140210020A1Publication Date: 2014-07-31
- Inventor: Alfons Dehe
- Applicant: INFINEON TECHNOLOGIES AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00
Abstract:
MEMS devices with a rigid backplate and a method of making a MEMS device with a rigid backplate are disclosed. In one embodiment, a device includes a substrate and a backplate supported by the substrate. The backplate includes elongated protrusions.
Public/Granted literature
- US08921956B2 MEMS device having a back plate with elongated protrusions Public/Granted day:2014-12-30
Information query
