发明申请
- 专利标题: CHIP SORTING APPARATUS
- 专利标题(中): 芯片分类设备
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申请号: US14220060申请日: 2014-03-19
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公开(公告)号: US20140202627A1公开(公告)日: 2014-07-24
- 发明人: Chen-Ke HSU , Liang Sheng CHI , Chun-Chang CHEN , Win-Jim SU , Hsu-Cheng LIN , Mei-Ling TSAI , Yi Lung LIU , Chen OU
- 申请人: Epistar Corporation
- 申请人地址: TW Hsinchu
- 专利权人: EPISTAR CORPORATION
- 当前专利权人: EPISTAR CORPORATION
- 当前专利权人地址: TW Hsinchu
- 优先权: TW098124963 20090723
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/66
摘要:
A method of chip sorting comprises providing a chip holder having a first surface; providing multiple chips on the first surface; providing a chip receiver having a second surface, wherein the second surface faces the first surface; attaching the multiple chips to the second surface; decreasing an adhesion between the multiple chips and the first surface; and separating the multiple chips from the first surface after the step of decreasing the adhesion between the multiple chips and the first surface.
公开/授权文献
- US09011638B2 Chip sorting apparatus 公开/授权日:2015-04-21
信息查询
IPC分类: