发明申请
US20140154471A1 CURABLE COMPOSITION FOR IMPRINTS, PATTERNING METHOD AND PATTERN 有权
适用于印花,图案方法和图案的可固化组合物

CURABLE COMPOSITION FOR IMPRINTS, PATTERNING METHOD AND PATTERN
摘要:
Disclosed is a to provide a curable composition for imprints capable of keeping a good patternability and of producing less defects even after repetitive pattern transfer. The curable composition for imprints comprising: a polymerizable compound (A); a photo-polymerization initiator (B); and a non-polymerizable compound (C) having a polyalkylene glycol structure having at least one terminal hydroxy group, or at least one etherified terminal hydroxy group, and containing substantially no fluorine atom and no silicon atom.
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