Invention Application
- Patent Title: CLEANING COMPOSITION AND CLEANING METHOD USING THE SAME
- Patent Title (中): 清洁组合物和使用该清洁组合物的清洁方法
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Application No.: US14054833Application Date: 2013-10-16
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Publication No.: US20140107008A1Publication Date: 2014-04-17
- Inventor: Yu-Chi Fu , Wen-Tsai Tsai , Ming-Hui Lu , Song-Yuan Chang
- Applicant: UWIZ Technology Co., Ltd.
- Applicant Address: TW Taoyuan County
- Assignee: UWIZ Technology Co., Ltd.
- Current Assignee: UWIZ Technology Co., Ltd.
- Current Assignee Address: TW Taoyuan County
- Priority: TW101138102 20121016
- Main IPC: H01L21/02
- IPC: H01L21/02
Abstract:
A cleaning composition is provided. The cleaning composition includes at least one polyamino-polycarboxylic acid or at least one salt thereof, at least one solvent, at least one substituted or non-substituted phenethylamine and water. The solvent is selected from a group consisting of glycols.
Public/Granted literature
- US09165760B2 Cleaning composition and cleaning method using the same Public/Granted day:2015-10-20
Information query
IPC分类:
