- 专利标题: PASSIVE DEVICES FOR FINFET INTEGRATED CIRCUIT TECHNOLOGIES
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申请号: US13431347申请日: 2012-03-27
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公开(公告)号: US20130258532A1公开(公告)日: 2013-10-03
- 发明人: William F. Clark, JR. , Robert J. Gauthier, JR. , Junjun Li
- 申请人: William F. Clark, JR. , Robert J. Gauthier, JR. , Junjun Li
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L21/20 ; H01L21/33 ; G06F17/50 ; H01L21/8249 ; H01L29/06 ; H01L29/73 ; H02H7/20 ; H01L21/331
摘要:
Device structures, design structures, and fabrication methods for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A portion of a device layer of a semiconductor-on-insulator substrate is patterned to form a device region. A well of a first conductivity type is formed in the epitaxial layer and the device region. A doped region of a second conductivity type is formed in the well and defines a junction with a portion of the well. The epitaxial layer includes an exterior sidewall spaced from an exterior sidewall of the device region. Another portion of the device layer may be patterned to form fins for fin-type field-effect transistors.
公开/授权文献
- US09219056B2 Passive devices for FinFET integrated circuit technologies 公开/授权日:2015-12-22
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