Invention Application
- Patent Title: METHOD FOR PROVIDING ELECTRICAL CONNECTIONS TO SPACED CONDUCTIVE LINES
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Application No.: US13751781Application Date: 2013-01-28
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Publication No.: US20130210230A1Publication Date: 2013-08-15
- Inventor: Gurtej Sandhu , Scott Sills
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee Address: US ID Boise
- Main IPC: H01L21/308
- IPC: H01L21/308

Abstract:
An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.
Public/Granted literature
- US08629051B2 Method for providing electrical connections to spaced conductive lines Public/Granted day:2014-01-14
Information query
IPC分类: