发明申请
US20130210195A1 PACKAGING METHOD OF MOLDED WAFER LEVEL CHIP SCALE PACKAGE (WLCSP)
有权
模压水平切片尺寸包装(WLCSP)的包装方法
- 专利标题: PACKAGING METHOD OF MOLDED WAFER LEVEL CHIP SCALE PACKAGE (WLCSP)
- 专利标题(中): 模压水平切片尺寸包装(WLCSP)的包装方法
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申请号: US13547358申请日: 2012-07-12
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公开(公告)号: US20130210195A1公开(公告)日: 2013-08-15
- 发明人: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- 申请人: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- 主分类号: H01L21/78
- IPC分类号: H01L21/78
摘要:
A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.
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