发明申请
- 专利标题: MEMS-BASED VOLTMETER
- 专利标题(中): 基于MEMS的电压表
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申请号: US13352219申请日: 2012-01-17
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公开(公告)号: US20130181697A1公开(公告)日: 2013-07-18
- 发明人: Paul M. Werking
- 申请人: Paul M. Werking
- 申请人地址: US NJ Morristown
- 专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人: HONEYWELL INTERNATIONAL INC.
- 当前专利权人地址: US NJ Morristown
- 主分类号: G01R17/02
- IPC分类号: G01R17/02
摘要:
An electromechanical system (MEMS) voltmeter. An exemplary MEMS voltmeter includes a proof mass mounted to a substrate in a teeter-totter manner. The MEMS voltmeter also includes an input voltage plate located on the substrate under a first end of the proof mass. The first input voltage plate receives a voltage from a device under test. A drive voltage plate is located on the substrate under a second end of the proof mass. A first sense input voltage plate is located on the substrate under the first end of the proof mass. A second sense voltage plate is located on the substrate under the second end of the proof mass. A rebalancing circuit receives signals from the proof mass and the first and second sense voltage plates and generates a voltage value that is equal to the root mean square (RMS) voltage of the device under test.
公开/授权文献
- US09018937B2 MEMS-based voltmeter 公开/授权日:2015-04-28
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