发明申请
- 专利标题: Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method
- 专利标题(中): 压电微机械传感器部件及相应的测量方法
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申请号: US13635581申请日: 2011-01-19
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公开(公告)号: US20130098154A1公开(公告)日: 2013-04-25
- 发明人: Reinhard Neul , Christian Rettig , Achim Trautmann , Daniel Christoph Meisel , Alexander Buhmann , Manuel Engesser , Ando Feyh
- 申请人: Reinhard Neul , Christian Rettig , Achim Trautmann , Daniel Christoph Meisel , Alexander Buhmann , Manuel Engesser , Ando Feyh
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102010002994.7 20100318
- 国际申请: PCT/EP2011/050641 WO 20110119
- 主分类号: G01P15/09
- IPC分类号: G01P15/09
摘要:
A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.
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