发明申请
- 专利标题: Floating Body Cell Structures, Devices Including Same, and Methods for Forming Same
-
申请号: US13609997申请日: 2012-09-11
-
公开(公告)号: US20130011977A1公开(公告)日: 2013-01-10
- 发明人: Sanh D. Tang , John K. Zahurak , Werner Juengling
- 申请人: Sanh D. Tang , John K. Zahurak , Werner Juengling
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.
公开/授权文献
信息查询
IPC分类: