Invention Application
- Patent Title: SILICON CARBIDE SEMICONDUCTOR DEVICE
- Patent Title (中): 硅碳化硅半导体器件
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Application No.: US13348781Application Date: 2012-01-12
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Publication No.: US20120181551A1Publication Date: 2012-07-19
- Inventor: Shinichiro Miyahara , Hidefumi Takaya , Masahiro Sugimoto , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- Applicant: Shinichiro Miyahara , Hidefumi Takaya , Masahiro Sugimoto , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- Applicant Address: JP Toyota-city JP Kariya-city
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- Current Assignee Address: JP Toyota-city JP Kariya-city
- Priority: JP2011-5970 20110114
- Main IPC: H01L29/24
- IPC: H01L29/24

Abstract:
A silicon carbide semiconductor device includes a silicon carbide semiconductor substrate and a trench. The silicon carbide semiconductor substrate has an offset angle with respect to a (0001) plane or a (000-1) plane and has an offset direction in a direction. The trench is provided from a surface of the silicon carbide semiconductor substrate. The trench extends in a direction whose interior angle with respect to the offset direction is 30 degrees or −30 degrees.
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