Invention Application
US20120181551A1 SILICON CARBIDE SEMICONDUCTOR DEVICE 审中-公开
硅碳化硅半导体器件

SILICON CARBIDE SEMICONDUCTOR DEVICE
Abstract:
A silicon carbide semiconductor device includes a silicon carbide semiconductor substrate and a trench. The silicon carbide semiconductor substrate has an offset angle with respect to a (0001) plane or a (000-1) plane and has an offset direction in a direction. The trench is provided from a surface of the silicon carbide semiconductor substrate. The trench extends in a direction whose interior angle with respect to the offset direction is 30 degrees or −30 degrees.
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