Embodiments of the present invention are directed to an in-line system and process for forming a selective emitter solar cell. In one embodiment, a liquid dopant material is applied to a silicon substrate and dried to at least a semi-solid state. In another embodiment, a dopant material is deposited on a silicon substrate using a chemical vapor deposition process. A laser is then used to thermally excite regions of the substrate to drive the dopant atoms from the dopant material deep into the substrate to form highly doped regions. The substrate is then thermally processed to form a lightly doped emitter region and a shallow p-n junction in the remaining field region of the substrate. Conductive contacts are then deposited on the highly doped regions.