Invention Application
US20120147097A1 MICRO-EJECTOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
微喷射器及其制造方法

MICRO-EJECTOR AND METHOD OF MANUFACTURING THE SAME
Abstract:
There are provided a micro-ejector and a method of manufacturing the same. The micro-ejector includes an upper substrate including an inlet into which a fluid is drawn from the outside and a chamber groove; a lower substrate including a reservoir groove to provide a reservoir storing the fluid drawn through the inlet; a piezoelectric actuator formed on the upper substrate and supplying a driving force for fluid ejection to a chamber; and at least one support protruding from a bottom of the reservoir groove so as to support the upper substrate.
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