Invention Application
- Patent Title: SHOWERHEAD INTEGRATING INTAKE AND EXHAUST
- Patent Title (中): 淋浴收集和排气
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Application No.: US13211309Application Date: 2011-08-17
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Publication No.: US20120145078A1Publication Date: 2012-06-14
- Inventor: Chih-Yung Huang , Ching-Chiun Wang , Chen-Der Tsai , Wen-Tung Hsu , Fu-Ching Tung , Chien-Chih Chen , Yi-Tsung Pan , Chien-Jen Sun
- Applicant: Chih-Yung Huang , Ching-Chiun Wang , Chen-Der Tsai , Wen-Tung Hsu , Fu-Ching Tung , Chien-Chih Chen , Yi-Tsung Pan , Chien-Jen Sun
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Priority: TW99143375 20101210; TW100127734 20110804
- Main IPC: C23C16/455
- IPC: C23C16/455 ; B05B1/14

Abstract:
A showerhead integrating intake and exhaust is provided for showering a gas. The showerhead at least includes a showerhead body that has a gas-active surface and a plurality of intake bores thereon. The showerhead body further includes a central exhaust vent disposed on the gas-active surface. The central exhaust vent may exhaust standing gas and further pre-exhaust byproduct from reaction process.
Information query
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