发明申请
- 专利标题: Methods of Fabricating Non-Volatile Memory Devices
- 专利标题(中): 制造非易失性存储器件的方法
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申请号: US13155678申请日: 2011-06-08
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公开(公告)号: US20110300686A1公开(公告)日: 2011-12-08
- 发明人: Soo-doo Chae , Ki-hyun Hwang , Han-mei Choi , Jun-kyu Yang , Byong-ju Kim
- 申请人: Soo-doo Chae , Ki-hyun Hwang , Han-mei Choi , Jun-kyu Yang , Byong-ju Kim
- 优先权: KR10-2010-0053992 20100608
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
Methods of forming non-volatile memory devices include forming a semiconductor layer having a first impurity region of first conductivity type extending adjacent a first side thereof and a second impurity region of second conductivity type extending adjacent a second side thereof, on a substrate. A first electrically conductive layer is also provided, which is electrically coupled to the first impurity region. The semiconductor layer is converted into a plurality of semiconductor diodes having respective first terminals electrically coupled to the first electrically conductive layer. The first electrically conductive layer operates as a word line or bit line of the non-volatile memory device. The converting may include patterning the first impurity region into a plurality of cathodes or anodes of the plurality of semiconductor diodes (e.g., P-i-N diodes).
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